MEMS Design Education by Case Studies

Abstract

Abstract Advances in microelectromechanical systems (MEMS) technology are based on understanding of the issues involved in design, analysis, fabrication, characterization, and use of the finished products. Although this understanding is being developed “on the job” to satisfy immediate needs of rapid advances in the emerging MEMS technology, there is also growing demand for “academic” education in MEMS. Whether on-the-job or academic, development of the required understanding is no easy task because the MEMS field is very multidisciplinary. Those involved should be able to work simultaneously with topics relating to physics, chemistry, materials, computer science, engineering, as well as other relevant disciplines. To facilitate preparation of future engineers for work with MEMS, we have developed undergraduate and graduate courses addressing some of the crucial issues relating to MEMS. These courses are based on case studies that we have developed in our laboratories. The courses include lectures, laboratory experiments, student projects, and presentations. This paper describes selected case studies used in our courses as they relate to design education with MEMS.