1. Faculty of Mechatronics, Warsaw University of Technology, Sw. Andrzeja Boboli 8, Warsaw 02-525, Poland
2. Institute of Microelectronics and Optoelectronics, Warsaw University of Technology, Koszykowa 75, Warsaw 00-662, Poland
3. Łukasiewicz Research Network, Institute of Electronic Materials Technology, Wólczyńska 133, Warsaw 01-919, Poland