Slip Flow in the Hydrodynamic Entrance Region of Circular and Noncircular Microchannels

Abstract

Abstract Microscale fluid dynamics has received intensive interest due to the emergence of micro-electro-mechanical systems (MEMS) technology. When the mean free path of the gas is comparable to the channel’s characteristic dimension, the continuum assumption is no longer valid and a velocity slip may occur at the duct walls. Noncircular cross sections are common channel shapes that can be produced by microfabrication. The noncircular microchannels have extensive practical applications in MEMS. The paper deals with issues of hydrodynamic flow development. Slip flow in the entrance of circular and parallel plate microchannels is first considered by solving a linearized momentum equation. It is found that slip flow is less sensitive to analytical linearized approximations than continuum flow and the linearization method is an accurate approximation for slip flow. Also, it is found that the entrance friction factor Reynolds product is of finite value and dependent on the Kn and tangential momentum accommodation coefficient but independent of the cross-sectional geometry. Slip flow and continuum flow in the hydrodynamic entrance of noncircular microchannels has been examined and a model is proposed to predict the friction factor and Reynolds product f Re for developing slip flow and continuum flow in most noncircular microchannels. It is shown that the complete problem may be easily analyzed by combining the asymptotic results for short and long ducts. Through the selection of a characteristic length scale, the square root of cross-sectional area, the effect of duct shape has been minimized. The proposed model has an approximate accuracy of 10% for most common duct shapes.