The Effect of Die Attach Voiding on the Thermal Resistance of Chip Level Packages

Author:

Fleischer Amy S.1,Johnson Barry C.1,Chang Li-Hsin2

Affiliation:

1. Villanova University, Villanova, PA

2. University of Arizona, Tucson, AZ

Abstract

During semiconductor manufacturing, voids are easily formed in the die attach bond layer and are found to form, grow and coalesce with thermal cycling. The presence of such voids is known to adversely affect the package thermal resistance, but to this point, not enough data exists to precisely analyze the effects of void size, configuration and depth. Using an innovative experimental method the present study investigates these effects with a carefully controlled void geometry. The results show that the thermal resistance increases linearly with void percentage for random voids, but increases exponentially for contiguous voids.

Publisher

ASMEDC

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