Micromachined Particle Filter With Low Power Dissipation
Author:
Yang Joon Mo1, Ho Chih-Ming1, Yang Xing2, Tai Yu-Chong2
Affiliation:
1. Mechanical and Aerospace Engineering Department, University of California, Los Angeles, Los Angeles, CA 90095 2. Electrical Engineering Department, California Institute of Technology, Pasadena, CA 91125
Abstract
Microfilters for collecting micron-size airborne biological agents are designed and fabricated using a micro-electro-mechanical-system (MEMS) fabrication technology. The thickness of the microfilter ranges from 1 μm–3 μm, and the hole diameter from 5 μm–12 μm. Iterations between experimental and numerical studies are carried out to attain efficient microfilter designs with low pressure drop. Two orders of magnitude reduction of viscous power consumption have been achieved. A design rule of the filter in a low Reynolds-number range was first derived from numerical simulations. Highly accurate measurements of the three-dimensional (3-D) geometry, side-wall profile, and diameter of the micron-size holes are critical in validating and modifying the design rule. The effect of the surface slip is found to be small in the tested Knudsen-number range.
Publisher
ASME International
Subject
Mechanical Engineering
Reference21 articles.
1. Kittilsland, G., Steme, G., and Norden, B., 1990, “A Submicron Particle Filter in Silicon,” Sens. Actuators A, 23, pp. 904–907. 2. van Rijn, C. J. M., and Elwenspoek, M. C., 1995, “Micro Filtration Membrane Sieve with Silicone Micro Machining for Industrial and Biomedical Application,” Proceedings of IEEE the Eighth Workshop on Micro Electro Mechanical Systems, Amsterdam, the Netherlands, pp. 83–87. 3. van Rijn, C. J. M., van der Wekken, M., Hijdam, W., and Elwenpoek, M. C., 1997, “Deflection and Maximum Load of Microfiltration Membrane Sieves Made with Silicon Micromachining,” J. Microelectromech. Syst., 6, pp. 48–54. 4. Yang, X., Yang, J. M., Tai, Y.-C., and Ho, C.-M., 1999, “Micromachined Membrane Particle Filters,” Sens. Actuators A, 73, pp. 184–191. 5. Chu, W.-H., Chin, R., Huen, T., and Ferrari, M., 1999, “Silicone Membrane Nanofilters from Sacrificial Oxide Removal,” J. Microelectromech. Syst., 8, pp. 34–42.
Cited by
25 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
|
|