1. LabMEMS—Laboratory of Nano & Microfluidics and Microsystems, Mechanical Engineering Department—PEM, POLI/COPPE, Rio de Janeiro 21945-970, Brazil;
2. Nanoengineering Department—PENT, COPPE, Federal University of Rio de Janeiro, UFRJ, Cx. Postal 68503—Cidade Universitária, Rio de Janeiro 21945-970, Brazil e-mail:
3. Nanoengineering Department—PENT, COPPE, Federal University of Rio de Janeiro, UFRJ, Cx. Postal 68503—Cidade Universitária, Rio de Janeiro 21945-970, Brazil
4. Mechanical Engineering Department, Polytechnic Institute, State University of Rio de Janeiro, IPRJ/UERJ, Nova Friburgo, RJ 28625-570, Brazil