1. Department of Mechanical and Automation Engineering, Institute of Precision Engineering, The Chinese University of Hong Kong, Hong Kong e-mail:
2. Shenzhen Key Laboratory of Precision Engineering, Shenzhen Institutes of Advanced Technology, Chinese Academy of Sciences, Shenzhen 518055, China e-mail:
3. Shenzhen Key Laboratory of Precision Engineering, Shenzhen Institutes of Advanced Technology, Chinese Academy of Sciences, Shenzhen 518055, China;
4. Department of Mechanical Engineering, Northwestern University, Evanston, IL 60208 e-mail:
5. Professor Fellow ASME Department of Mechanical and Automation Engineering, Institute of Precision Engineering, The Chinese University of Hong Kong, Hong Kong e-mail: