1. Department of Mechanical and Aerospace Engineering, Rutgers, The State University of New Jersey, Piscataway, NJ 08854
2. Institute of Biomedical Technology, R&D Center for Microsystem Reliability, Chung Yuan Christian University, Chungli City, Taiwan 32032 email:
3. Department of Mechanical and Aerospace Engineering, Rutgers, The State University of New Jersey, Piscataway, NJ 08854 e-mail: