Some Aspects of Micro-Fabrication Using Electro Discharge Deposition Process

Abstract

The growing demand for micro-parts has led to the development of many processes for their production. One of the emerging processes in this category is the electric discharge deposition process in which a micro tool in the form of a wire is used. The tool wear is increased intentionally so that the worn out material gets deposited on the substrate. Experiments are designed using response surface methodology to identify the key operating parameters (voltage, current, duty cycle and pulse on-time) and then to study their effects on the structure’s height, and width. As a concluding part, micro parts (star and letters IITK) are fabricated on the substrate material and a method is proposed and demonstrated to detach micro parts from the metallic substrate material.