1. Graduate Institute of Manufacturing Technology, National Taipei University of Technology , Taipei 10608, Taiwan ; , Sejong 30016, South Korea
2. Department of Mechanical and Design Engineering, Hongik University , Taipei 10608, Taiwan ; , Sejong 30016, South Korea
3. Institute of Mechatronic Engineering, National Taipei University of Technology , Taipei 10608, Taiwan
4. Institute of Mechanical and Electrical Engineering, National Taipei University of Technology , Taipei 10608, Taiwan
5. Material and Chemical Research Laboratories, Industrial Technology Research Institute , Hsinchu 310401, Taiwan
6. Department of Mechanical and Design Engineering, Hongik University , Sejong 30016, South Korea
7. Department of Semiconductor and Electro-Optical Technology, Minghsin University of Science and Technology , Hsinchu 30401, Taiwan