Fast Dispersive Laser Scanner by Using Digital Micro Mirror Arrays-Reference-Cited by-同舟云学术

Fast Dispersive Laser Scanner by Using Digital Micro Mirror Arrays

Published:2014-04-08 Issue:2 Volume:2 Page:
ISSN:2166-0468
Container-title:Journal of Micro and Nano-Manufacturing
language:en
Short-container-title:

Author:

Kalyoncu Salih K.¹²,Torun Rasul³⁴,Huang Yuewang²,Zhao Qiancheng²,Boyraz Ozdal³⁴

Affiliation:

1. The Scientific and Technological Research Council of Turkey, Gebze 41400, Turkey;

2. EECS Department, University of California, Irvine, CA 92697 e-mail:

3. EECS Department, University of California, Irvine, CA 92697;

4. EECS Department, Istanbul Sehir University, Istanbul 34662, Turkey e-mail:

Abstract

We demonstrate a fast dispersive laser scanning system by using MEMS digital micro-mirror arrays technology. The proposed technique utilizes real-time dispersive imaging system, which captures spectrally encoded images with a single photodetector at pulse repetition rate via space-to-time mapping technology. Wide area scanning capability is introduced by using individually addressable micro-mirror arrays as a beam deflector. Experimentally, we scanned ∼20 mm2 at scan rate of 5 kHz with ∼150 μm lateral and ∼160 μm vertical resolution that can be controlled by using 1024 × 768 mirror arrays. With the current state of art MEMS technology, fast scanning with <30 μs and resolution down to single mirror pitch size of 10.8 μm is also achievable.

Publisher

ASME International

Subject

Industrial and Manufacturing Engineering,Process Chemistry and Technology,Mechanics of Materials

Link

http://asmedigitalcollection.asme.org/micronanomanufacturing/article-pdf/doi/10.1115/1.4027127/6062618/jmnm_002_02_021004.pdf

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