Design and Control of Optimal Scan Trajectories: Scanning Tunneling Microscope Example
-
Published:2004-03-01
Issue:1
Volume:126
Page:187-197
-
ISSN:0022-0434
-
Container-title:Journal of Dynamic Systems, Measurement, and Control
-
language:en
-
Short-container-title:
Author:
Perez Hector1, Zou Qingze1, Devasia Santosh1
Affiliation:
1. Department of Mechanical Engineering, Box 352600, University of Washington, Seattle, WA, 98195
Abstract
This article addresses the optimal (minimal input energy) design of scan trajectories, which is important in applications such as the imaging and manipulation of nano-scale surface phenomena using scanning tunneling microscopes (STM), MEMS-based micro-scanners, quick-return mechanisms and cams used in manufacturing, and general repeating processes. The contribution of this article is the systematic solution of the optimal scan-trajectory design problem. As opposed to existing techniques that require pre-specification of the desired output trajectory (such prespecifications can be ad hoc), the optimal output trajectory is found as a result of the proposed input-energy minimization approach. In this sense, the proposed approach leads to a systematic solution of the optimal output-trajectory-design problem. The proposed optimal scanning method is applied to an experimental scanning tunneling microscope; simulation and experimental results are presented to illustrate the efficacy of the proposed approach to design optimal scan-trajectories.
Publisher
ASME International
Subject
Computer Science Applications,Mechanical Engineering,Instrumentation,Information Systems,Control and Systems Engineering
Reference29 articles.
1. Barrett, R., and Quate, C., 1991, Optical scan-correction system applied to atomic force microscopy. Rev. Sci. Instrum., 62(6), 1393–1399. 2. Cai, C., Chen, X., Shu, Q., and Zheng, X., Dec., 1993, Computer correction for distorted stm images. Rev. Sci. Instrum., 63(12), 5649–5652. 3. Cloet, C., Tomizuka, M., and Horowitz, R., July 2001, Design requirements and reference trajectory generation for a copier paper-path. IEEE/ASME International Conference on Advanced Intelligent Mechatronics Proceedings, pages 911–916. Como, Italy. 4. Croft, D., and Devasia, S., December 1999, Vibration compensation for high speed scanning tunneling microscopy. Rev. Sci. Instrum., 70(12), 4600–4605. 5. Curtis, R., Mitsui, T., and Ganz, E., 1997, An ultrahigh vacuum high speed scanning tunneling microscope. Rev. Sci. Instrum., 68, 2790–2796.
Cited by
25 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
|
|