1. School of Mechanical and Aerospace Engineering and National Creative Research Initiatives Center for Multiscale Design, Seoul National University, Seoul 151-742, Korea
2. School of Mechanical Engineering, Kunsan National University, Kunsan, Chonbuk 573-701, Korea
3. Brooks Automation Asia, Gomaeri 398-1, Kiheung, Yongin, Kyungki 449-901, Korea
4. School of Mechanical and Aerospace Engineering and National Creative Research Initiative Center for Multiscale Design, Seoul National University, Seoul 151-742, Korea