1. Shenzhen Key Laboratory of Precision Engineering, Shenzhen Institutes of Advanced Technology, Chinese Academy of Sciences, Shenzhen 518055, China;
2. Department of Mechanical Engineering, Northwestern University, 2145 Sheridan Road, Evanston, IL 60208 e-mail:
3. Shenzhen Key Laboratory of Precision Engineering, Shenzhen Institutes of Advanced Technology, Chinese Academy of Sciences, 1068 Xueyuan Avenue, Xili Nanshan, Shenzhen 518055, China e-mail:
4. Department of Mechanical and Automation Engineering, Institute of Precision Engineering, The Chinese University of Hong Kong, Room 110, William M. W. Mong Engineering Building, CUHK, Shatin, New Territories, Hong Kong, China e-mail:
5. Shenzhen Institutes of Advanced Technology, Chinese Academy of Sciences, 1068 Xueyuan Avenue, Xili Nanshan, Shenzhen 518055, China e-mail:
6. Professor F-ASME, F-SME, F-HKIE, Department of Mechanical and Automation Engineering, Institute of Precision Engineering, The Chinese University of Hong Kong, Room 209, William M.W. Mong Engineering Building, CUHK, Shatin, New Territories, Hong Kong, China e-mail: