Deposition Technologies For Micromanufacturing: A Review-Reference-Cited by-同舟云学术

Deposition Technologies For Micromanufacturing: A Review

Published:2004-11-01 Issue:4 Volume:126 Page:787-795
ISSN:1087-1357
Container-title:Journal of Manufacturing Science and Engineering
language:en
Short-container-title:

Author:

Kadekar Vinay¹,Fang Weiya¹,Liou Frank¹

Affiliation:

1. University of Missouri-Rolla, Rolla, MO 65409-1350

Abstract

This paper discusses the microdeposition technologies used in the fabrication of meso- and microscale structures. The ability to process a wide range of materials and the flexibility to build functional and geometrically complex structures in meso- and microscale gives the microdeposition method some advantages over micromachining or lithography methods investigated extensively in the past. In this paper, work on deposition technology is reviewed, including material, supply of material, powder flow rate, and manipulation of particles and microdeposition technologies. The advantages and disadvantages of each technology are summarized at the end of the paper.

Publisher

ASME International

Subject

Industrial and Manufacturing Engineering,Computer Science Applications,Mechanical Engineering,Control and Systems Engineering

Link

http://asmedigitalcollection.asme.org/manufacturingscience/article-pdf/126/4/787/5494030/787_1.pdf

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