Three-Dimensional Elastic-Plastic Fractal Analysis of Surface Adhesion in Microelectromechanical Systems
Affiliation:
1. Department of Mechanical Engineering, University of California, Berkeley, CA 94720
Abstract
High adhesion is often encountered at contact interfaces of miniaturized devices, known as microelectromechanical systems, due to the development of capillary, electrostatic, and van der Waals attractive forces. In addition, deformation of contacting asperities on opposing surfaces produces a repulsive interfacial force. Permanent surface adhesion (referred to as stiction) occurs when the total interfacial force is attractive and exceeds the micromachine restoring force. In the present study, a three-dimensional fractal topography description is incorporated into an elastic-plastic contact mechanics analysis of asperity deformation. Simulation results revealing the contribution of capillary, electrostatic, van der Waals, and asperity deformation forces to the total interfacial force are presented for silicon/silicon and aluminum/aluminum material systems and different mean surface separation distances. Results demonstrate a pronounced effect of surface roughness on the micromachine critical stiffness required to overcome interfacial adhesion.
Publisher
ASME International
Subject
Surfaces, Coatings and Films,Surfaces and Interfaces,Mechanical Engineering,Mechanics of Materials
Reference30 articles.
1. Alley, R. L., Cuan, G. J., Howe, R. T., and Komvopoulos, K., 1992, “The Effect of Release-Etch Processing on Surface Microstructure Stiction,” Proc. IEEE Solid-State Sensor and Actuator Workshop, Hilton Head Island, SC, June 21–25, 1992, pp. 202–207. 2. Apte, R. B., Sandejas, F. S. A., Banyai, W. C., and Bloom, D. M., 1994, “Deformable Grating Light Valves for High Resolution Displays,” Proc. IEEE Solid-State Sensor and Actuator Workshop, Hilton Head Island, SC, June 13–16, 1994, pp. 1–6. 3. Ausloos M. , and BermanD. H., 1985, “A Multivariate Weierstrass-Mandelbrot Function,” Proc. Roy. Soc. (London), Series A, Vol. 400, pp. 331–350. 4. Bhushan B. , 1985, “The Real Area of Contact in Polymeric Magnetic Media II: Experimental Data Analysis,” ASLE Transactions, Vol. 28, pp. 181–197. 5. Bhushan B. , and MajumdarA., 1992, “Elastic-Plastic Contact Model for Bifractal Surfaces,” Wear, Vol. 153, pp. 53–64.
Cited by
35 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
|
|