1. Department of Mechanical and Environmental Informatics, Tokyo Institute of Technology, Ookayama 2-12-1, Meguro-ku, Tokyo 152-8552, Japan
2. Dimensional Standards Section, National Metrology Institute of Japan, AIST, Umezono 1-1-1, Tsukuba, Ibaraki 305-8563, Japan
3. Department of Mechanical Engineering and Science, Kyoto University, Yoshidahonmachi, Sakyo-ku, Kyoto-shi, Kyoto 606-8501, Japan