Microelectromechanical Systems Cantilever Resonators Under Soft Alternating Current Voltage of Frequency Near Natural Frequency-Reference-Cited by-同舟云学术

Microelectromechanical Systems Cantilever Resonators Under Soft Alternating Current Voltage of Frequency Near Natural Frequency

Published:2015-04-01 Issue:4 Volume:137 Page:
ISSN:0022-0434
Container-title:Journal of Dynamic Systems, Measurement, and Control
language:en
Short-container-title:

Author:

Caruntu Dumitru I.¹,Knecht Martin W.²

Affiliation:

1. Mem. ASME Mechanical Engineering Department, University of Texas Pan American, 1201 W University Drive, Edinburg, TX 78539 e-mail:

2. Engineering Department, South Texas College, McAllen, TX 78501 e-mail:

Abstract

This paper deals with nonlinear-parametric frequency response of alternating current (AC) near natural frequency electrostatically actuated microelectromechanical systems (MEMS) cantilever resonators. The model includes fringe and Casimir effects, and damping. Method of multiple scales (MMS) and reduced order model (ROM) method are used to investigate the case of weak nonlinearities. It is reported for uniform resonators: (1) an excellent agreement between the two methods for amplitudes less than half of the gap, (2) a significant influence of fringe effect and damping on bifurcation frequencies and phase–frequency response, respectively, (3) an increase of nonzero amplitudes' frequency range with voltage increase and damping decrease, and (4) a negligible Casimir effect at microscale.

Publisher

ASME International

Subject

Computer Science Applications,Mechanical Engineering,Instrumentation,Information Systems,Control and Systems Engineering

Link

http://asmedigitalcollection.asme.org/dynamicsystems/article-pdf/doi/10.1115/1.4028887/6118576/ds_137_04_041016.pdf

Reference46 articles.

1. Modeling and Performance of Uncoated Microcantilever-Based Chemical Sensors;Sens. Actuators, B,2010

2. Integration of Microfluidic and Cantilever Technology for Biosensing Application in Liquid Environment;Biosens. Bioelectron.,2010

3. Silicon Resonant Mirocatilevers for Absolute Pressure Measurement;J. Vac. Sci. B,2006

4. Estimation of Oscillation Period/Switching Time for Electrostatically Actuated Microbeam Type Switches;Int. J. Mech. Sci.,2011

5. Energy Harvesting: State-of-the-Art;Renewable Energy,2010

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