Observation of Femtosecond Laser-Induced Ablation in Crystalline Silicon-Reference-Cited by-同舟云学术

Observation of Femtosecond Laser-Induced Ablation in Crystalline Silicon

Published:2004-10-01 Issue:5 Volume:126 Page:723-726
ISSN:0022-1481
Container-title:Journal of Heat Transfer
language:en
Short-container-title:

Author:

Choi Tae Y.¹,Grigoropoulos Costas P.²

Affiliation:

1. Institute of Energy Technology, Swiss Federal Institute of Technology Zurich, Zurich, CH-8092 Switzerland

2. Department of Mechanical Engineering, University of California, Berkeley, Berkeley, CA 94720-1740

Abstract

The ablation of crystalline silicon by ultrashort laser pulses is studied experimentally. A pump-and-probe experiment is implemented in a collinear arrangement, utilizing a time-delayed frequency-doubled probe beam for in situ reflectance measurement and ultrafast microscopy observation. Enhanced surface reflectivity in sub-picosecond time scale at the center of the irradiated spot indicates nonthermal liquid layer formation. A short-lived nonthermal liquid phase was detected at fluence of 1.5J/cm2. In addition to this observation, the reflected images for pump beam fluences ranging from 1.5 to 4.6J/cm2 provide evidence of plasma expansion above the irradiated target.

Publisher

ASME International

Subject

Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science

Link

http://asmedigitalcollection.asme.org/heattransfer/article-pdf/126/5/723/5913808/723_1.pdf

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