1. Department of Precision and Microsystems Engineering, Delft University of Technology, Mekelweg 2, Delft 2628 CD, The Netherlands e-mail:
2. Professor Department of Mechanical Engineering, Laval University, 1065 Avenue de la médecine, Québec, QC G1V 0A6, Canada
3. Department of Precision and Microsystems Engineering, Delft University of Technology, Mekelweg 2, Delft 2628 CD, The Netherlands
4. Professor Department of Precision and Microsystems Engineering, Delft University of Technology, Mekelweg 2, Delft 2628 CD, The Netherlands