MEMS Across the Valley of Death

Author:

Brown Alan S.

Abstract

This paper elaborates increasing use of microelectromechanical systems (MEMS) in aerospace industry. MEMS are chip-size devices usually carved from semiconductor wafers. Jet engines running lean fuel mixtures are prone to instability. High-temperature MEMS sensors could improve performance and fuel mileage while reducing emissions. The paper also discusses different MEMS structures, as MEMS structures vary greatly. The oscillating proofmass structures sense angular rotation around an axis in the gyro on the right. The industry has also begun to build a more innovation-ready infrastructure. The MEMS and Nanotechnology Exchange provides another way to ease the tortuous path to commercialization. It promises more prototypes, and more technologies will flow from MEMS inventors in the future. However, experts believe that the real problem is that until more MEMS companies begin making money in aerospace, venture capitalists hesitate to fund their companies.

Publisher

ASME International

Subject

Mechanical Engineering

Cited by 2 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. Uncertainty in microscale gas damping: Implications on dynamics of capacitive MEMS switches;Reliability Engineering & System Safety;2011-09

2. Uncertainty quantification models for micro-scale squeeze-film damping;International Journal for Numerical Methods in Engineering;2010-11-11

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