Mechanical Design of Compliant Microsystems—A Perspective and Prospects
Author:
Affiliation:
1. Mechanical Engineering, Indian Institute of Science, Bangalore, India
2. Mechanical Engineering, Brigham Young University, Provo, Utah
Publisher
ASME International
Subject
Computer Graphics and Computer-Aided Design,Computer Science Applications,Mechanical Engineering,Mechanics of Materials
Link
http://asmedigitalcollection.asme.org/mechanicaldesign/article-pdf/127/4/736/5806161/736_1.pdf
Reference47 articles.
1. Design and Fabrication of Microelectromechanical Systems;Kota;J. Mech. Des.
2. Multi-User MEMS Processes (MUMPs), 2005, http://www.memscap.com/memsrus/crmumps.html.
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