1. Moriyama, S., Ushida, F., and Seya, E., 1988, “Development of a Precision Diamond Turning Machine for Fabrication of Asymmetric Aspheric mirrors,” Opt. Eng. (Bellingham), 27(11), pp. 1008–1012.
2. Stroscio, J., and Kaiser, W., 1993, Scanning Tunneling Microscopy, Academic Press, New York.
3. Products for Micropositioning Catalog, 1990, Physik Instrumente, Waldronn, Germany.
4. Furutani, K., Urushibata, M., and Mohr, N., 1998, “Improvement of Control Method for Piezoelectric Actuator by Combining Induced Charge Feedback with Inverse Transfer Function Compensation,” Proc. of 1998 IEEE Int. Conf. on Robotics and Automation, pp. 1504–1509.
5. Newcomb, C., and Flinn, I., 1982, “Improving the Linearity of Piezoelectric Ceramic Actuators,” Electron. Lett., 10, pp. 442–444.