Author:
Nishimoto Manabu,Nakamura Kozo,Hourai Masataka,Ono Toshiaki,Sugimura Wataru,Motooka Teruaki
Publisher
Japan Institute of Metals
Subject
Materials Chemistry,Metals and Alloys,Mechanics of Materials,Condensed Matter Physics
Reference18 articles.
1. The Direct Observation of Grown‐in Laser Scattering Tomography Defects in Czochralski Silicon
2. Dependence of the Grown-in Defect Distribution on Growth Rates in Czochralski Silicon
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4. 5) T. Sinno: Semiconductor Silicon 2002, (The Electrochem. Soc. Pennington, N. J., PV2002-2, 2002) p. 212.
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