Author:
Tanaka Masaki,Higashida Kenji,Nakashima Hideharu,Takagi Hidenari,Fujiwara Masami
Publisher
Japan Institute of Metals
Subject
Materials Chemistry,Metals and Alloys,Mechanics of Materials,Condensed Matter Physics
Reference27 articles.
1. Silicon microstructuring technology
2. Silicon micromachining for integrated microsystems
3. 3) A.E. Carlsson and R. Thomson: Solid State Physics, Ed. by H. Ehrenreich and F. Spaepen, Vol.51, (Academic Press, 1997) pp.233-280.
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