Chemical Modification of Titanium Nitride Films via Ion Implantation
Author:
Affiliation:
1. Center for Collaborate Research, University of Tokyo
2. Tokyo Metropolitan Industrial Research Institute
3. National Metal and Materials Technology Center
Publisher
Japan Institute of Metals
Subject
Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science
Link
https://www.jstage.jst.go.jp/article/matertrans/44/10/44_10_1962/_pdf
Reference32 articles.
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2. 2) G.R. Fenske: Ion Implantation. ASM Handbook. 18 (Friction, Lubrication and Wear Technology), (ASM Internationl., 1992) 850–860.
3. 3) J.L. Walter, D.W. Skelly and W.P. Minner: Wear 170 (1993) 79–92.
4. 4) K.T. Kern, K.C. Walter, A.J. Griffin Jr., Y. Lu and M. Nastasi: Nucl. Instrum. Meth. Phys. Res. B 127/128 (1997) 972–976.
5. 5) A. J. Perry: Mater. Sci. Engg. A 253 (1998) 310–318.
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