Hydrogenation Reactions and Their Kinetics for SiCl<SUB>4</SUB>(g)–H<SUB>2</SUB>(g) and SiCl<SUB>4</SUB>(g)–Si(s)–H<SUB>2</SUB>(g) Systems Using a Fixed Bed Type Reactor-Reference-Cited by-同舟云学术

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Hydrogenation Reactions and Their Kinetics for SiCl₄(g)–H₂(g) and SiCl₄(g)–Si(s)–H₂(g) Systems Using a Fixed Bed Type Reactor

Published:1992 Issue:12 Volume:33 Page:1138-1148
ISSN:0916-1821
Container-title:Materials Transactions, JIM
language:en
Short-container-title:Mater. Trans., JIM

Author:

Sugiura Masahito¹,Kurita Hirotaka¹,Nisida Takuo¹,Fuwa Akio¹

Affiliation:

1. Department of Materials Science and Engineering, Waseda University

Publisher

Japan Institute of Metals

Subject

General Engineering

Link

https://www.jstage.jst.go.jp/article/matertrans1989/33/12/33_12_1138/_pdf

Reference11 articles.

1. 1) Japan Electronic Industry Development Association, Research Report No. 58-M-212 (1986).

2. 2) Y. Abe: Bulletin Japan Inst. Metals, 23 (1984), 765.

3. 3) Union Carbide Corp. Final Report, D.O.E./J.P.L. Contract no. 954, 334 (1979).

4. 4) J. P. Mui and D. Seyferth: Massachusetts Institute of Technology Final Report, D.O.E./J.P.L. Contract no. 955, 382 (1981).

5. 5) J. P. Mui: Solarelectronics, Inc. Final Report, D.O.E./J.P.L. Contract no. 956, 061 (1981).

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