Nanoimprinting of Metallic Glass for Periodic Nano-Hole Structures with Dies Fabricated by FIB-CVD and RIE
Author:
Affiliation:
1. Department of Materials Processing, Graduate School of Engineering, Tohoku University
2. Osaka Center, Institute for Materials Research, Tohoku University
3. Institute for Materials Research, Tohoku University
4. Tohoku University
Publisher
Japan Institute of Metals
Subject
Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science
Link
https://www.jstage.jst.go.jp/article/matertrans/52/2/52_M2010241/_pdf
Reference15 articles.
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3. 3) A. Inoue: Acta Mater. 48 (2000) 279–306.
4. 4) Y. Saotome, Y. Fukuda, I. Yamaguchi and A. Inoue: J. Alloy. Compd. 434–435 (2007) 97–101.
5. 5) Y. Saotome, K. Itoh, T. Zhang and A. Inoue: Scr. Mater. 44 (2001) 1541–1545.
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