Nanoindentation Behaviour and Microstructural Evolution of Au/Cr/Si Thin Films
Author:
Affiliation:
1. Department of Mechanical Engineering, National Cheng Kung University
2. Center for Micro/Nano Science and Technology, National Cheng Kung University
Publisher
Japan Institute of Metals
Subject
Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science
Link
https://www.jstage.jst.go.jp/article/matertrans/50/7/50_MRA2008385/_pdf
Reference21 articles.
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3. 3) A. Rar and G. M. Pharr: J. Mater. Res. 21 (2006) 552–556.
4. 4) H. Saka and S. Abe: Mater. Sci. Eng. A 234–236 (1997) 552–554.
5. 5) J. W. Jang, S. Hayes, J. K. Lin and D. R. Frear: Appl. Phys. 95 (2004) 6077–6081.
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