Stability of Postannealed Silicon Dioxide Electret Thin Films Prepared by Magnetron Sputtering
Author:
Affiliation:
1. Optoelectronic Device System Research & Development Center, Kanazawa Institute of Technology
2. Technical & Research Division, Hosiden Corporation
Publisher
Japan Institute of Metals
Subject
Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science
Link
https://www.jstage.jst.go.jp/article/matertrans/43/5/43_5_946/_pdf
Reference19 articles.
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3. 3) H. Amjadi and C. Thielemann: IEEE Transaction on Dielectrics and Electrical Insulation 3 (1996) 494–498.
4. 4) C.Thielemann and G.Hess: Sensor and Actuators A61 (1997) 352–355.
5. 5) W. M. D. Wright and D. G. Chetwynd: Nanotechnology 9 (1998) 133–142.
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