1. International Research Centre for Nano Handling and Manufacturing of China, Changchun University of Science and Technology, Changchun, China; Ministry of Education Key Laboratory for Cross-scale Micro and Nano Manufacturing, Changchun University of Science and Technology, Changchun, China
2. International Research Centre for Nano Handling and Manufacturing of China, Changchun University of Science and Technology, Changchun, China; Ministry of Education Key Laboratory for Cross-scale Micro and Nano Manufacturing, Changchun University of Science and Technology, Changchun, China; Joint Research Centre for Computer-Controlled Nanomanufacturing and Institute for Research in Applicable Computing, University of Bedfordshire, Luton, UK