Coefficient of thermal expansion–based MEMS infrared detector

Abstract

The design and performance simulation of a novel coefficient of thermal expansion–based MEMS infrared detector is discussed. The detector design uses thermal expansion coefficient materials physically interfaced with piezoelectric resonators constructed using the MEMS process. The optics, in front of the detector, consists of an infrared lens and a band-pass filter operating in the wavelength range of 8–14 µm. By using the extended blackbody calculator and thermally induced stress in the thermal expansion coefficient material – copper, the detector and resonator performance is characterized in terms of the resonator frequency as a function of scene temperature. The detector has performance comparable with common infrared (IR) imaging systems currently available in the mid-wavelength IR and long-wavelength IR spectral ranges.