Affiliation:
1. Fuchita Nanotechnology, Ltd.
2. National Institute for Materials Science
Subject
Materials Chemistry,Condensed Matter Physics,General Chemistry,Ceramics and Composites
Reference17 articles.
1. Deposition of Ultra Fine Particles Using a Gas Jet
2. 2) C. Hayashi, Mater. Sci. Forum, 246, 153–180 (1997).
3. 4) Japanese Patent 1660799, Japanese Patent 1513241 [in Japanese].
4. 5) E. Fuchita, K. Setoguchi, I. Katsu, R. Mizutani and M. Oda, Proc. 8th Int. Microelectronics Conf. (IMC 94), p. 20.
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