Preparation of scandium aluminum nitride thin films by using scandium aluminum alloy sputtering target and design of experiments
Author:
Affiliation:
1. Measurement Solution Research Center, National Institute of Advanced Industrial Science and Technology
2. Research Laboratories, DENSO CORPORATION
Publisher
Ceramic Society of Japan
Subject
Materials Chemistry,Condensed Matter Physics,General Chemistry,Ceramics and Composites
Link
http://www.jstage.jst.go.jp/article/jcersj2/118/1384/118_1384_1166/_pdf
Reference23 articles.
1. Microstructure and electronic properties of the refractory semiconductor ScN grown on MgO(001) by ultra-high-vacuum reactive magnetron sputter deposition
2. Elastic properties and optical phonon frequencies of zinc-blende ScxGa1−xN
3. Calculated phonon band structure and density of states and interpretation of the Raman spectrum in rocksalt ScN
4. First-principles calculations of the ground-state properties and stability of ScN
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