Improvement in Linearity of Calibration Curves Using Matrix Components as Modifiers in ETV/ICP-MS and Application for SBT Thin Film
Author:
Affiliation:
1. Lighting Company, Matsushita Electric Industrial Co., Ltd.
Publisher
Ceramic Society of Japan
Subject
Materials Chemistry,Condensed Matter Physics,General Chemistry,Ceramics and Composites
Link
http://www.jstage.jst.go.jp/article/jcersj/114/1332/114_1332_705/_pdf
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3. Determination of the metallic-impurity distribution on a silicon wafer by the multiple indicator-rod method for liquid-phase dissolution and graphite-furnace AAS.
4. Determination of trace metals on a silicon wafer by acid dissolution and graphite furnace AAS.
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