Dense Yttrium Oxide Film Prepared by Aerosol Deposition Process at Room Temperature
Author:
Affiliation:
1. Research Institute, TOTO Ltd.
2. Department of Chemistry, Nagaoka University of Technology
Publisher
Ceramic Society of Japan
Subject
Materials Chemistry,Condensed Matter Physics,General Chemistry,Ceramics and Composites
Link
http://www.jstage.jst.go.jp/article/jcersj/114/1327/114_1327_272/_pdf
Reference21 articles.
1. Microstructure and Electrical Properties of Lead Zirconate Titanate (Pb(Zr52/Ti48)O3) Thick Films Deposited by Aerosol Deposition Method
2. Influence of Carrier Gas Conditions on Electrical and Optical Properties of Pb(Zr, Ti)O3Thin Films Prepared by Aerosol Deposition Method
3. Powder Preparation in Aerosol Deposition Method for Lead Zirconate Titanate Thick Films
4. Mechanical and Electrical Properties of Al2O3 Thin Films on Metals, Ceramics and Resins Prepared by Aerosol Deposition Method
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2. Piezoelectric thick film fabricated with aerosol deposition and its application to piezoelectric devices;Japanese Journal of Applied Physics;2018-06-26
3. Plasma Exposure Behavior of Yttrium Oxide Film Formed by Aerosol Deposition Method;IEEE Transactions on Semiconductor Manufacturing;2017-11
4. Fabrication, characterization, and fluorine-plasma exposure behavior of dense yttrium oxyfluoride ceramics;Japanese Journal of Applied Physics;2017-05-02
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