Mathematical model for a micromachined accelerometer-Reference-Cited by-同舟云学术

Mathematical model for a micromachined accelerometer

Published:1996-04 Issue:2 Volume:18 Page:92-98
ISSN:0142-3312
Container-title:Transactions of the Institute of Measurement and Control
language:en
Short-container-title:Transactions of the Institute of Measurement and Control

Author:

Lewis C.P.¹,Kraft M.¹,Hesketh T.G.¹

Affiliation:

1. Coventry University, School of Engineering, Q-block, Nonlinear Systems Design Group, Priory St, Coventry, CV1 5FB,UK

Abstract

A mathematical model is developed for both open- and closed-loop accelerometers having capacitive sensing and electrostatic feedback. Test results on actual micromachined devices are compared with simulation employing the mathematical model.

Publisher

SAGE Publications

Subject

Instrumentation

Link

http://journals.sagepub.com/doi/pdf/10.1177/014233129601800204

Reference11 articles.

1. Wide dynamic range direct accelerometer

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