Simultaneous optimization of actuators' configuration and vibration control in ultra-precision motion systems with a time-varying performance location
Author:
Affiliation:
1. State Key Laboratory of Tribology and Beijing Laboratory of Precision/Ultra-Precision Manufacture Equipment and Control, Department of Mechanical Engineering, Tsinghua University, Beijing 100084, People's Republic of China
Funder
Autonomous Scientific Research Project of Tsinghua University at China
National Natural Science Foundation of China
Publisher
SAGE Publications
Subject
Mechanical Engineering,Mechanics of Materials,Aerospace Engineering,Automotive Engineering,General Materials Science
Link
http://journals.sagepub.com/doi/pdf/10.1177/1077546319840897
Reference37 articles.
1. Direct Velocity Feedback Control of Large Space Structures
2. Performance of an active control system with piezoelectric actuators
3. Position Control in Lithographic Equipment [Applications of Control]
4. Negative derivative feedback for vibration control of flexible structures
5. Reduction of spillover effects on independent modal space control through optimal placement of sensors and actuators
Cited by 2 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. A Novel Dynamic Decoupling Approach Based on Command Shaping for Overactuated Motion Systems;IEEE Transactions on Industrial Electronics;2023
2. A Co-Optimization Method of Actuators/Sensors Placement and LQG Controller for Vibration Suppression;IEEE Access;2021
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