Effect of Relative Intensity of 5 eV Atomic Oxygen and 172 nm Vacuum Ultraviolet in the Synergism of Polyimide Erosion

Author:

Yokota Kumiko1,Ohmae Nobuo1,Tagawa Masahito1

Affiliation:

1. Department of Mechanical Engineering, Faculty of Engineering, Kobe University, Rokko-dai 1-1, Nada, Kobe 657-8501, Japan

Abstract

A quantitative study of the synergistic effect of 5 eV atomic oxygen and 172 nm vacuum ultraviolet radiation exposure was carried out on polyimide samples. The relative intensity of atomic oxygen and ultraviolet was adjusted by rotating the polyimide sample at the crossover point of the beam axes of atomic oxygen and ultraviolet which crossed 900. The erosion rate of polyimide was calculated from the resonant frequency of the quartz crystal microbalance on which the polyimide was spin-coated. It was confirmed that the ultraviolet exposure to the atomic oxygen-exposed polyimide promoted the desorption of carbon oxides from the surface. In contrast, no mass change was detected when ultraviolet irradiated the polyimide surface without atomic oxygen exposure. By changing the relative intensity of atomic oxygen and ultraviolet, increases in erosion rates up to 400% were observed when the relative ultraviolet/atomic oxygen flux intensity reached 10-14 mJ atom-l.

Publisher

SAGE Publications

Subject

Materials Chemistry,Organic Chemistry,Polymers and Plastics

Reference17 articles.

1. [1] Brinza D E , Chung S Y Minton T K and Liang R H 1994 Final Report on the NASA/JPL Evaluation of Oxygen Interactions with Materials-3 (EOIM-3) JPL Publication 94-31

2. Vacuum ultraviolet radiation/atomic oxygen synergism in materials reactivity

3. A high flux source of energetic oxygen atoms for material degradation studies

4. [4] Tagawa M , Yokota K , Kinoshita H and Ohmae N 2003 Proceedings of the 9th International Symposium on Materials in a Space Environment, ESA-SP540, p.265-265

同舟云学术

1.学者识别学者识别

2.学术分析学术分析

3.人才评估人才评估

"同舟云学术"是以全球学者为主线,采集、加工和组织学术论文而形成的新型学术文献查询和分析系统,可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容,当前同舟云学术共收录了国内外主流学术期刊6万余种,收集的期刊论文及会议论文总量共计约1.5亿篇,并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询!咨询电话:010-8811{复制后删除}0370

www.globalauthorid.com

TOP

Copyright © 2019-2024 北京同舟云网络信息技术有限公司
京公网安备11010802033243号  京ICP备18003416号-3