Toxicological Investigations in the Semiconductor Industry: IV: Studies On the Subchronic Oral Toxicity and Genotoxicity of Vacuum Pump Oils Contaminated By Waste Products From Aluminum Plasma Etching Processes-Reference-Cited by-同舟云学术

Toxicological Investigations in the Semiconductor Industry: IV: Studies On the Subchronic Oral Toxicity and Genotoxicity of Vacuum Pump Oils Contaminated By Waste Products From Aluminum Plasma Etching Processes

Published:1995-09 Issue:5 Volume:11 Page:523-541
ISSN:0748-2337
Container-title:Toxicology and Industrial Health
language:en
Short-container-title:Toxicol Ind Health

Author:

Bauer Siegfried¹,Wolff Ilona¹,Werner Nadeshda¹,Schmidt Reiner²,Blume Rudolf³,Pelzing Matthias⁴

Affiliation:

1. Department of Environmental Toxicology Martin Luther University Halle-Wittenberg Halle, Germany

2. Institute of Human Genetics and Medical Biology Martin Luther University Halle-Wittenberg Halle, Germany

3. Institute of Anatomy and Cell Biology Martin Luther University Halle-Wittenberg Halle, Germany

4. Department of Chemistry University of Leipzig Leipzig, Germany

Abstract

Dry etching processes in semiconductor manufacturing use ionized gases in closed reactors at pressures below 1 torr. Vacuum pump systems that service the reaction chambers are potential sources of exposure to complex mixtures of

Publisher

SAGE Publications

Subject

Health, Toxicology and Mutagenesis,Public Health, Environmental and Occupational Health,Toxicology

Link

http://journals.sagepub.com/doi/pdf/10.1177/074823379501100506

Reference28 articles.

1. Methods for detecting carcinogens and mutagens with the salmonella/mammalian-microsome mutagenicity test

2. High-field drift velocity of electrons in silicon inversion layers

3. Toxicological Investigations of Waste Products from the Plasma Etching Process in the Semiconductor Industry

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