A film bulk acoustic resonator pressure sensor based on lateral field excitation-Reference-Cited by-同舟云学术

A film bulk acoustic resonator pressure sensor based on lateral field excitation

Published:2018-11 Issue:11 Volume:14 Page:155014771881434
ISSN:1550-1477
Container-title:International Journal of Distributed Sensor Networks
language:en
Short-container-title:International Journal of Distributed Sensor Networks

Author:

Su Shujing¹,Geng Zihui²,Ma Xiaoxin¹,Tan Qiulin¹,Xiong Jijun¹

Affiliation:

1. Science and Technology on Electronic Test & Measurement Laboratory, North University of China, Taiyuan, China

2. School of Electrical Engineering and Information, Sichuan University, Chengdu, China

Abstract

A high-sensitive thickness shear mode film bulk acoustic resonator pressure sensor based on lateral field excitation is designed with its structure simulated in environment of air and liquids. A finite element model of film bulk acoustic resonator pressure sensor structure is established to obtain frequency variation under different pressure conditions by parameter sweep method when the multi-physics fields are added to the model. The results of simulation show that the pressure sensor’s resonance frequency is 2.114 GHz and pressure sensitivity is 1200 Hz/kPa in air. In liquid environment, film bulk acoustic resonator pressure sensor displays a pressure sensitivity of 325 Hz/kPa in ethanol, 475 Hz/kPa in deionized water, and 612.5 Hz/kPa in glycerol. This film bulk acoustic resonator pressure sensor has been proved to be highly sensitive both in air and liquid environment and has the potential to be used in biomedical applications.

Funder

National Nature Science Foundation of China

Publisher

SAGE Publications

Subject

Computer Networks and Communications,General Engineering

Link

http://journals.sagepub.com/doi/pdf/10.1177/1550147718814343

Reference24 articles.

1. Sensitivity Analysis of Lateral Field Excited Acoustic Wave Gas Sensors with Finite Element Method

2. The pure-shear mode solidly mounted resonator based on c-axis oriented ZnO film

3. Label-free immunosensor based on micromachined bulk acoustic resonator for the detection of trace pesticide residues

4. Label-free detection of human prostate-specific antigen (hPSA) using film bulk acoustic resonators (FBARs)

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