Affiliation:
1. Institute of Microengineering and Nanoelectronics (IMEN), Universiti Kebangsaan Malaysia (UKM), Bangi, Selangor, Malaysia
2. Harvard John A. Paulson School of Engineering and Applied Sciences (SEAS), Cambridge, MA, USA
Abstract
In this article, we report modeling, simulation, and analysis of shifting 2D photonic crystal cavity side holes in GaN-AlN-sapphire layered structure. The design was simulated with Lumerical finite-difference time-domain. A lattice constant a, 157 nm, and a hole diameter d, 106 nm, were used in the design. The cavities are based on L3, which we demonstrated by simply shifting two holes away from a line cavity with distances of 132, 142, and 152 nm, respectively. The highest quality factor, Q, value achieved is 2.25 × 104 at 152-nm cavity distance.
Subject
Electrical and Electronic Engineering,Ceramics and Composites,Electronic, Optical and Magnetic Materials,Biotechnology
Cited by
3 articles.
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