Affiliation:
1. Department of Physics, Faculty of Science, Cairo University, Giza, Egypt
Abstract
We report the structural and optical characterization of one-dimensional porous silicon microcavities. These structures are based on a planar resonator formed by two high-reflectance mirrors separated by a thin active optical spacer. In order to simulate and predict the optical properties of the microcavity, the transfer matrix method is used. A strong correlation between the formation parameters and the reflectance spectra is introduced. The prepared microcavities are exposed to thermal oxidation. The resonance position of the microcavity exhibits a blueshift proportional to the degree of oxidation. Structural changes of the microcavities after oxidation are investigated and analyzed using X-ray diffraction and Raman spectroscopy. The observed shift of characteristic silicon peak is attributed to the reduction of silicon crystallites as the oxidation increases.
Subject
Electrical and Electronic Engineering,Ceramics and Composites,Electronic, Optical and Magnetic Materials,Biotechnology
Cited by
7 articles.
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