Data-based double-feedforward controller design for a coupled parallel piezo nanopositioning stage
Author:
Affiliation:
1. Hubei Key Laboratory of Waterjet Theory and New Technology, Wuhan University, Wuhan, P.R. China
Funder
Shenzhen Science and Technology Program
Natural Science Foundation of China
Publisher
SAGE Publications
Subject
Mechanical Engineering,Control and Systems Engineering
Link
http://journals.sagepub.com/doi/pdf/10.1177/0959651817732502
Reference40 articles.
1. A Survey of Control Issues in Nanopositioning
2. Scanning Probe Microscopy
3. Atomic Force Microscope
4. Dahl Model-Based Hysteresis Compensation and Precise Positioning Control of an XY Parallel Micromanipulator With Piezoelectric Actuation
5. Development, Modeling, and Control of a Micro-/Nanopositioning 2-DOF Stick–Slip Device
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1. A systematic identification approach for biaxial piezoelectric stage with coupled Duhem-type hysteresis;COMPEL - The international journal for computation and mathematics in electrical and electronic engineering;2021-04-09
2. Damping Controller Design for Triangular Scanning of a Third-Order Nanopositioning Stage;2019 19th International Conference on Control, Automation and Systems (ICCAS);2019-10
3. Model reference adaptive damping control for a nanopositioning stage with load uncertainties;Review of Scientific Instruments;2019-04
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