Online visual monitoring and ultrasonic feedback detection in the ultrasonic precision bonding of polymers

Abstract

Ultrasonic bonding is a convenient bonding technology, which features sufficient cleanliness, high efficiency, no need for additional bonding aids, and other outstanding advantages. In recent years, it has been introduced into the field of the micro–nano assembly of polymer micro–nano devices, but it is still difficult for current ultrasonic bonding technology to meet the accuracy requirements of the micro–nano assembly. To improve the control accuracy of the hot-melt interface in the process of ultrasonic bonding, an online hot-melt interface monitoring method and an online ultrasonic transmission efficiency detection method are proposed in this article. With these detection methods, the real-time monitoring of the hot-melt interface can be realized on the basis of machine vision, while high-frequency dynamic force sensors can be used to detect the ultrasonic vibration transmitted from the ultrasonic horn to the anvil. Based on these methods, a functional anvil based on visual monitoring and ultrasonic detection is developed, the finite element method has been used to analyze the transmission characteristics of ultrasonic vibration, and experiments are carried out regarding online detection in the process of ultrasonic bonding. The results show that this system can realize the online detection of the hot-melt interface and ultrasonic transmission information, providing a new control method for ultrasonic bonding technology.