1. Institute of Manufacturing Engineering, Department of Mechanical Engineering, Tsinghua University, Beijing, China
2. Institute of Instrument Science and Technology, Department of Precision Instrument, Tsinghua University, Beijing, China
3. Beijing Key Laboratory of Precision and Ultra-Precision Manufacturing Equipments and Control, Tsinghua University, Beijing, China
4. State Key Laboratory of Tribology, Tsinghua University, Beijing, China