Theoretical analysis and finite element method simulations on dynamic sensitivity of hemisphere-shaped electrostatic sensors

Abstract

Electrostatic sensors are key components of electrostatic monitoring systems. Their sensitivity characteristics have a direct influence on monitoring accuracy. In previous studies, spatial sensitivity, which is called static sensitivity here, was used to describe the sensitivity characteristics. However, it only reflects a basic relationship between static charged particles and induced charges on an electrostatic sensor’s probe. Besides, as a three-dimensional defined parameter, it is difficult to build a unified model if actual boundary conditions are considered. Thus, it is not quite proper for applications that detect moving particles. To solve this problem, dynamic sensitivity is proposed in this article. As for a hemisphere-shaped electrostatic sensor, first, a more accurate model of static sensitivity is built. Based on it, dynamic sensitivity is defined and modeled analytically. Then, a calibration method is proposed to improve the model’s accuracy under actual boundary conditions. In the end, finite element method simulations are done for validations. The results demonstrate that dynamic sensitivity reflects a relationship between moving charged particles and the actual output signals of a sensor, thus it is direct and practical for moving particles. And the theoretical results are highly consistent with the simulated ones. Moreover, the dynamic sensitivity indicates localized sensing characteristics of hemisphere-shaped electrostatic sensors.