Design and experiments of ultra-precision aerostatic turning machine tool-Reference-Cited by-同舟云学术

Design and experiments of ultra-precision aerostatic turning machine tool

Published:2022-07-29 Issue:23 Volume:236 Page:11150-11159
ISSN:0954-4062
Container-title:Proceedings of the Institution of Mechanical Engineers, Part C: Journal of Mechanical Engineering Science
language:en
Short-container-title:Proceedings of the Institution of Mechanical Engineers, Part C: Journal of Mechanical Engineering Science

Author:

Wu Quanhui¹²³^ORCID,Sun Yazhou²,Pan Baisong¹³,GU Dawei¹³

Affiliation:

1. College of Mechanical Engineering, Zhejiang University of Technology, Hangzhou, China

2. School of Mechatronics Engineering, Harbin Institute of Technology, Harbin, China

3. Key Laboratory of E&M, Ministry of Education, Zhejiang University of Technology, Hangzhou, China

Abstract

Ultra-precision turning is one of the commonly machining methods to obtain high-quality optical components. Ultra-precision turning machine tools are the industrial equipment that realize ultra-precision turning process. In this paper, a combined design, performance analysis and experimental verification are carried out to build an ultra-precision aerostatic turning machine tool (UPATMT), which adopts aerostatic support systems for the spindle system and the feed system. Firstly, the mathematical model and physical model of UPATMT are established, and the dynamic performance of UPATMT model is carried out and analyzed by finite element method. In addition, the electromechanical control system is simulated and analyzed to obtain better dynamic performance. Finally, the modal tests and turning experiments are carried out on a homemade UPATMT platform. The machined workpiece surface roughness is measured, the arithmetical mean deviation of the workplace surface roughness is Ra 7.4 nm, and the maximum peak valley height of workplace surface roughness Rz 34.4 nm. The results show that electromechanical coupling analysis can obtain high machining performance of UPATMT.

Publisher

SAGE Publications

Subject

Mechanical Engineering

Link

http://journals.sagepub.com/doi/pdf/10.1177/09544062221110393

Reference17 articles.

1. Design of Microstructure Parameters on a Small Multi-Throttle Aerostatic Guideway in Photolithography

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