1. The State Key Laboratory of Tribology & Institute of Manufacturing Engineering, Department of Mechanical Engineering, Tsinghua University, Beijing, China
2. Beijing Key Lab of Precision/Ultra-precision Manufacturing Equipments and Control, Tsinghua University, Beijing, China
3. Nanjing Research Institute of Electronics Technology, Nanjing, China
4. Jiangsu Changhong Intelligent Equipment Group, Yancheng City, Jiangsu, China