Optimal design of high-performance aerostatic equipment based on finite difference method with flux error feedback

Abstract

This paper proposes an aerostatic lubrication model with the use of finite difference method, and the solution of the model is designed with the combination of flux error feedback and grid parameter optimization. The model and solution are validated by the performance test on the slider with the diameter of orifice at 50 and 200 μm. Finally, the proposed model is applied to the optimal design of the aerostatic turntable, and the type, parameter and configuration of the restriction are determined by the optimal results. To guarantee the accuracy of key parts, the ultra-precision turning technology is applied to manufacture of turntable, and the runout of the end face meets the design requirements through the verification. The proposed model and solution are significant to the analysis and design of high-performance aerostatic equipments.